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DA403 Multi-functional Ultra-high Precision Solidification Machine

  • Description

Project DA403-COC DA403-COB DA403-FC
Machine performance Equipment accuracy ±3μm@3sigma
Chip rotation ±0.1°@3sigma
Cycle ≤8s(Excluding temperature curve) ≤3s ≤8S
Bonding head accuracy X(0.5um),Z(0.5um),Theta(0.01deg)
Solid-state table accuracy X(0.5um),Y(0.5um)
Material processing capability Wafer size 3 crystal rings 6 inchesWafer Ring(2 inchesWaffle-park,Gel-Pak)
Chip size 0.15*0.15-8*8mm
Substrate size

(50-300mm)x(56-98mm)x(0.7-1.6mm)

Length x width x thickness

Box size

(110-320mm)x(56- 130mm)x(68- 190mm),

Length x width x thickness

Bangtou system Bonding power  20-800 g (According to different configurations)
Image recognition system PR system 256 gray levels
Resolution 2448pixelx2048pixel*Optional according to needs
Angular tolerance ±0.01°
Machine size and weight Size 1637x1245x1965mm(Length x Width x Height)
Weight 1220kg

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